Tsarin Tsarin Tsarin Tsarin Tsarin Tsarin Tsarin Tsarin XE-15

Kayan aiki Bayani:

Park XE-15 yana da cikakken samfurin jituwa. Its daban-daban samfurin tebur zane, samar da m da kuma abin dogara gwaji yanayi ga daban-daban girma, siffofi, da adadin samfuran. The disconnected rufe madauki XY mai bincike, kawar da karkata sakamako kuskure, samar da linearity. Gaskiya ba tare da tuntuɓar bincike yanayin, fadada dacewa samfurin iri yayin da yawa tsawaita bincike rayuwa da rage amfani da farashi.

Park Systems atomic makamashi microscope XE-15 fasaha sigogi:

Mai bincike

XY mai bincike

Flexible jagoranci rufe madauki sarrafawa guda module mai bincike

Binciken kewayon 100μm * 100μm (zaɓi 50μm * 50μm)

Flat offset: <2nm (40μm * 40μm dubawa)

Z mai bincike

Flexible jagoranci iko mai bincike

Binciken kewayon 12μm (zaɓi 25μm)

Sauti mita: > 5kHz

Surface hoton amo: 0.03nm

Samfurin tebur

Samfurin tebur iri: 16-bit samfurin tebur / 150mm diamita inji suction tebur (zaɓi 200mm diamita inji suction tebur)

Samfurin girma: 150mm * 150mm * 20mm

Samfurin nauyi: zui babban 500g

Samfurin tebur motsi kewayon: 150mm * 150mm (zaɓi 200mm * 200mm)

Babban fasali:

A. Innovation Multi-wuri samfurin tebur zane, samar da aiki inganci

● A lokaci guda aiki zui iya duba fiye da 16 samfuran

● Sample sanya mai sauki, scan da sauri

● Babban inganta daidaito da maimaitawa na data

II, tallafawa super-girma samfurin, saduwa da masana'antu ci gaban bukatun

● Zui babban goyon bayan 200 mm wafer, saduwa da bukatun masu amfani na yanzu da nan gaba

● Musamman zane don saduwa da ainihin bukatun masu amfani da semiconductor

3. Rich aiki yanayin zaɓi

● Cikakken goyon bayan daban-daban SPM ayyuka

● Goyon bayan daban-daban zaɓi auna yanayin

● Goyon bayan daban-daban na zaɓi kayan aiki, fadada kyakkyawan aiki