OTL-PECVD-1200PECVD tsarin, wanda ya kunshi OTL1200 injin bututun tandu, Quartz injin dakin, RF wutar lantarki, GX gas samar da tsarin, pumping tsarin, injin ma'auni tsarin.

Babban fasali:

1, ta hanyar samar da wutar lantarki na RF don juya gas a cikin dakin inji na quartz zuwa yanayin ion.

PECVD yana da ƙananan zafin jiki da ake buƙata fiye da CVD na yau da kullun don yin ajiyar gas na sinadarai.

3. Za a iya sarrafa girman damuwa na fim da aka ajiye ta hanyar mitar samar da ikon RF.

4, PECVD ne mafi girma, daidaito ne mafi kyau, daidaito da kwanciyar hankali fiye da na yau da kullun CVD.

5. Ana amfani da shi sosai a cikin: girma na nau'ikan fina-finai, kamar: SiOx, SiNx, SiOxNy da amorphous silicon (a-Si: H) da sauransu.

OTL-PECVD-1200 PECVD tsarin da Swedish Kanthal juriya waya a matsayin dumama kayan aiki, amfani da biyu layered gudun aiki tsarin da kuma 30 sassa na shirin sarrafa zafin jiki ma'auni, motsa lokaci trigger, sarrafa silicon iko, murya amfani da aluminum oxide polycrystalline fiber kayan, murya bututun biyu ƙarshen iya bakin karfe flange hatimi, bakin karfe flange shigar da iska baki, bawul da kuma matsin lamba ma'auni, inji matakin iya kai 10-3 Pa lokacin famba inji, tare da zafin jiki filin daidaitawa, surface zafin jiki low, tashi da zafin jiki sauri kudin, makamashi tanadi, farashin m da saur

(3), daidaitaccen juriya, daidaitaccen zafin jiki mai kyau

(4), dumama abubuwa: Sweden Kanthal A1 shigo da juriya waya (juriya waya iya alkawarin garanti na shekaru biyu)

Lokacin da kewaye overloaded ko leakage, da komai bude ta atomatik yanke

Wannan murhun yana sanye da sadarwa dubawa da kuma software, zai iya kai tsaye ta hanyar kwamfuta sarrafa murhun daban-daban sigogi, kuma zai iya lura daga kwamfuta a kan murhun PV da SV zafin jiki darajar da kuma kayan aiki na aiki, murhun na ainihin zafin jiki curve kwamfuta zai zana a ainihin lokacin, kuma zai iya adana kowane lokaci zafin jiki data, a kowane lokaci za a iya daidaita injin.

(2), Amfani da fasahar Japan don tsarawa.

(3), Spaces da kuma ceton wayar juriya a cikin murya duk da Japan mafi kyau thermal fasaha shirya, ta hanyar thermal software kwaikwayon zafi filin

(4), amfani da 4 makonni dumama, zafi filin mafi daidaitacce

(Duk shigo da kayan aiki ta hanyar UL takardar shaida)