A ranar 15 ga Afrilu, 2016, kamfanin Hitachi ya gabatar da sabon nau'in microscope na lantarki mai bincike - FlexSEM 1000. Tsarin samfurin yana da ƙarancin ƙarancin yanki, amma ƙuduri ba ya rasa manyan binciken lantarki ba, kuma aiki yana da sauƙi sosai, kusan ba tare da horo ba. Compact zane tare da ƙuduri na 4 nm.
Binciken lantarki microscope zai iya yin dubawa mai girma da kuma binciken abubuwa masu daidaito a kan farfajiyar kayan, yana da aikace-aikace masu yawa a fannoni kamar nanotechnology, kimiyyar rayuwa, bincike da ci gaban zane na samfurin da kuma binciken rashin aiki. A cikin 'yan shekarun nan, bukatar bincike na lantarki don lura da tsarin farfajiyar da nazarin abubuwa yana ƙaruwa, yayin da ƙarin masu amfani ke son amfani da binciken lantarki a cikin iyakantaccen sarari kamar layin samarwa, layin gwajin tsaro na inganci da ofishin ofishin. Saboda haka, ƙananan girman, sauki aiki, da kuma high ƙuduri scanning lantarki microscope ne sosai kulawa. FlexSEM 1000 yana da nisan 450mm da tsawon 640mm, yana da ƙarancin girman 52% idan aka kwatanta da samfurin SU1510, rage nauyi da 45%, rage amfani da wutar lantarki da 50%, kuma yana da daidaitaccen hanyar samar da wutar lantarki. Ana iya raba baƙi da na'urar samar da wutar lantarki, shigarwa tana da sassauci sosai.
FlexSEM 1000 yana amfani da sabon tsarin lantarki na lantarki da na'urar ganowa mai inganci tare da ƙuduri har zuwa 4nm. FlexSEM 1000 yana da ayyukan sarrafa kansa da yawa don sauƙin aiki, har ma da mai aiki na farko zai iya ɗaukar hotuna masu inganci da sauri. Bugu da ƙari, sabon aikin kewayawa "SEM MAP" yana iya kewayawa ta amfani da hotuna daban-daban na gani ko hotuna na lantarki, sauyawa cikin sauri da daidaito zuwa hangen nesa mai girma mai ban sha'awa da dannawa ɗaya.

Abubuwa:

a. Ta hanyar high hankali biyu lantarki detector, baya yaduwa detector, low inji detector (UVD)^*2), cimma high quality image lura a ƙarƙashin low hanzarta ƙarfin lantarki / low inji

b. Easy aiki, ko da sabon mutum iya daukar high quality hotuna

c. Sabon aikin kewayawa "SEM MAP" don sauƙaƙe kulle hangen nesa da sauri

d. Babban taga (30 mm)²SDD Energy Spectrum tsarin don sauƙi da sauri bincike abubuwa abubuwa^*2

*1 raba mai karɓar baƙi da ikon akwatin lokacin da aka saita a kan tebur

* 2 Zaɓuɓɓuka

Abubuwan		Abubuwan da ke ciki
karya ikon*3		4.0 nm @ 20 kV (SE: Babban yanayin inji) 15.0 nm @ 1 kV (SE: Babban yanayin inji) 5.0 nm @ 20 kV (BSE: yanayin ƙananan inji)
hanzarta ƙarfin lantarki		0.3 kV ～ 20 kV
Ƙara girma		6 × ~ 300,000 × (filim girma) 16 × ~ 800,000 × (Nuna girma)
Low injin yanayin		Injin kewayon: 6 ~ 100 Pa
Gun na lantarki		Pre-Pair Tungsten waya
Samfurin tebur		3-axis atomatik motor tebur X：0 ～ 40 mm, Y：0 ～ 50 mm, Z：5 ～ 15 mm R：360°, T：-15° ～ ＋90°
Max samfurin size		Diamita 80 mm
Max Sample tsayi		40 mm
Girma		Mai karɓar baƙi: 450 (W) x 640 (D) x 670 (H) mm Wutar lantarki: 450 (W) x 640 (D) x 450 (H) mm
Mai bincike Zaɓuɓɓuka		Babban hankali Low inji biyu lantarki detector (UVD) Mai binciken X-ray mai rarraba makamashi (EDS)